Fabrication of Micro Patterned Ceramic Structure by Imprinting Process

MICRO-EDM FOR MICRO-CHANNEL FABRICATION ON NONCONDUCTIVE ZrO2 CERAMIC

In this study, microelectro-discharge (micro-ED) milling of nonconductive ZrO2ceramicsis investigated using a Cu tool electrode in kerosene dielectric. An adhesive Cu foil is firmly attached on the workpiece to initiate the sparks. After the machining of Cu foil, an electrically conductive carbonic layer is formed on the ceramic workpiece disassociating the kerosene dielectric, which allows mic...

Fabrication of micro-optical switch by post-CMOS micromachining process

This work presents the micro-machined 2-D switch array for use on free-space optical interconnect platform integrated with a digital 1×8 de-multiplexer control circuit together. Moreover, this device employs electrostatic actuation for light beam directions control. The CMOS-MEMS array-based optical platform contains 10×10 circular micromirrors switching spots, the diameter of each mirror is ab...

Fabrication, Structure and Properties of Nanostructured Ceramic Membranes

Fabrication of Wireless Micro Pressure Sensor Using the CMOS Process

In this study, we fabricated a wireless micro FET (field effect transistor) pressure sensor based on the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The wireless micro pressure sensor is composed of a FET pressure sensor, an oscillator, an amplifier and an antenna. The oscillator is adopted to generate an ac signal, and the amplifier is used to amplify ...

Fabrication of Saddle-Shaped Surfaces by Flame Forming Process

The flame forming process is widely used to manufacture ship hull plates. The saddle-shaped surfaces have different curvatures in perpendicular angles of planes and the manufacturers face an anti-clastic curvature. In this article, the manufacturing of saddle-shaped surfaces utilizing the flame forming process is investigated. The spiral irradiating scheme is used for forming. In order to study...